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PROTECTION — Blue Pacific Solutio…
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Model stepped BPSG surface: (1) Si single-crystal substrate, …

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The B and P concentrations of BPSG thin films produced by different CVD..…
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Figure 1.10 from BASIC BPSG CVD KINETIC FEATURES | Semantic Scholar
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Optimized ranges of the dopant concentra…
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Figure 3 from Determination of BPSG Thin-Film Properties using IR Reflection Spectros…

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