Sputter Etching Si Faceting Slope - 搜索图片

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Sputter Deposition System
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nanoHUB.org - Resources: ECE 595M Lecture 8.2: Etching - Dry Etching: Watch Presentation
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Patent US20130168231 - Method For Sputter Dep…
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Figure 1 from Layer morphology analysis o…

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Plot of the rate of Si etching, R A , on the z-axis versus the... | Download Sc…
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Schematic diagram of the sputtering geometry used to prep…
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Designing for Rate and Uniformity Part 2: Steps for Best Sputter Deposition System De…
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Sputter profiles for various sputter times (silicate glass). | Downloa…

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4. Schematic of modular layout of the SFI sputtering system (11). | Download Scientific Diagram

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