Cryogenic Etch - 搜索图片

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(PDF) Cryogenic etch process development for profile control of …
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(PDF) Cryogenic etch process development fo…
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Silicon nitride etch rates vs etch temperature at different molar ratios. | Download Scienti…
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Coatings | Special Issue : Plasma Dry Etching: Advanced Processes, Plasma Induced Damag…

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Understanding Sheath Behavior Key to Plasma Etch - SemiWiki
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Figure 4 from Mechanisms for plasma cryogenic etching of po…
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GPC (A) and wet etch rate (B) of SiO2 films grown wit…
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Schematic diagram of the three options for damage free low-k etch: post... | Download Scientific ...

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