PECVD Sin - 搜索图片

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semanticscholar.org
Figure 8 from Reliability and electric properties for PECVD a-SiN/sub x/:H fil…
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semanticscholar.org
Thermal Stability of PECVD SiN/sub x/ Films | Semantic Sc…
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researchgate.net
Evolution of residual stress of PECVD SiN x and SiO 2 films with... | Download Scientific Diagram
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researchgate.net
Evolution of residual stress of PECVD SiN x and SiO 2 film…

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PECVD Conditions of a-SiNx Samples | Download Table
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academia.edu
(PDF) Electrical characterizatio…
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researchgate.net
s eff of the aSiO x-PECVD SiN x bilayer passivated cSi samples as a... | Downlo…
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ResearchGate
Stress of PECVD SiN x films deposited at 350 °C as a function of added... | Do…

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