EUV may happen at 7nm, but there is also evidence that the technology could slip and get pushed out to 5nm. EUV is making noticeable progress, although there are still issues with the power source, ...

There are other aspects as well. “The EUV mask infrastructure is ready for the insertion of EUV at 7nm,” said Meng Lee, director of product marketing at Veeco. “Mask manufacturers have been working ...