2 Hot wall rotary reactors for coating or etching particles using ALD/MLD or ALE ... Quadrupole mass spectrometry (QMS) is utilized as an in situ probe on several ALD/E process chamber in the group.

Atomic layer deposition (ALD) allows for precise control over film thickness and composition, producing coatings with excellent uniformity and mechanical properties. Hafnium-based ALD coatings ...

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Atomic layer deposition (ALD) is a process used to deposit a wide variety of thin film materials from the vapor phase of matter. The system involves alternating pulses of gaseous precursors that ...