The Helsinki ALD group does research in the field of inorganic materials chemistry. In the video you will see how the silicon substrates are prepared for atomic layer deposition, precursors are loaded ...

One of the unexplored frontiers in ALD is the enhancement of ALD reactions using non-thermal methods. We are exploring the ability of low energy electrons to enhance ALD reactions. The goal is to ...

ALD is ideal for coating high surface area electrodes with either protective films or active charge-storage films. We were the first to demonstrate that ALD protective films on either the cathode or ...

Platform for research and education in atomic layer level materials processing ALD center Finland is a national, centralized open access platform for research and education in atomic layer level ...