Through via hole fabrication process by deep reactive-ion etching (DRIE): (a) Sample cleaning; (b) Deposition of mask material; (c) Transfer of desired pattern; (d) Desired pattern achieved; (e) ...

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To store ever more data in electronic devices of the same size, the manufacturing processes for these devices need to be ...

The narrow, deep holes required for one type of flash memory are made twice as fast with the right recipe, which includes a ...

At least that’s [Sam]’s plan, which his new reactive-ion etching setup aims to make possible. While his Z1 dual differential amplifier chip was a huge success, the photolithography process he ...

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