1970i 和 1980i DUV 浸没式光刻系统。此前,荷兰的出口管制许可要求已适用于 TWINSCAN NXT:2000i 及后续 DUV 浸没式系统。ASML 的 EUV 系统的销售也需遵守许可 ...
(3) ASML will need to apply for export licenses with the Dutch government rather than the U.S. government for shipments of its Twinscan NXT:1970i and 1980i DUV immersion lithography systems ...