据国际光电工程学会（SPIE）报道，中国科学院（CAS）研究人员成功研发突破性的固态深紫外（DUV）激光，能发射 193 纳米的相干光（Coherent Light ...

Figure 2: The lens for DUV photolithography with the highest NA: Starlith 1900 from Carl Zeiss. An interesting and important question is what's next? In particular, which technology will be used ...