新浪网1 个月
世界最先进EUV光刻机开工！Intel已产3万块晶圆 14A工艺就用它
快科技2月26日消息，ASML Twinscan EXE:5000 EUV是当今世界上最先进的EUV极紫外光刻机，支持High-NA也就是高孔径，Intel去年抢先拿下了第一台，目前已经在 ...
36氪19 天
EUV光刻，有变
High NA EUV突破：英特尔季产3万片，imec 20nm良率90%，美光首用DRAM。 EUV技术自从其提出以来，面临着多重挑战，包括高成本、复杂的光学系统以及需要 ...
腾讯网5 天
EUV新局，巨头们的攻守之道
但芯片制造严重依赖极紫外光刻（EUV）技术，该技术却成为扩大生产规模的关键阻碍。自 2019 年首批商用 EUV 芯片下线以来，设备、光罩制作以及 ...
腾讯网1 个月
EUV的前景更加光明
但制造这些芯片严重依赖极紫外 (EUV) 光刻技术，这已成为扩大生产的最大障碍之一。自 2019 年首批商用 EUV 芯片下线以来，设备、掩模生成和光刻胶 ...
Nature5 个月
Lithography at EUV wavelengths
Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to be introduced in high-volume semiconductor chip production over the next three years. Research is now underway to investigate sub-10 ...
来自MSN29 天
世界最先进！ASML High-NA EUV光刻机已在Intel投入生产：晶圆生产效率 ...
快科技2月25日消息，Intel宣布，ASML首批两台高数值孔径（High-NA EUV）极紫光刻机已经在其工厂投入生产。初步数据显示，其效率、可靠性比上一代EUV ...
Semiconductor Engineering5 年
Improving EUV Process Efficiency
The semiconductor industry is rethinking the manufacturing flow for extreme ultraviolet (EUV) lithography in an effort to improve the overall process and reduce waste in the fab. Vendors currently are ...
TNO27 天
Contamination control for semiconductor equipment
TNO is a specialist in contamination control for extreme ultraviolet lithography (EUV). We develop modules, research equipment, and strategies for the contamination control of EUV lithography scanners ...
Consumer Reports3 个月
Chevrolet Bolt EUV
The new-for-2022 Bolt EUV (electric utility vehicle) is a taller, roomier version of the Bolt. Both the Bolt EV and the EUV share the same 200-hp electric motor that drives the front wheels ...