Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...

Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...

The etching and characterization room contains a suite of tools for dry etching and characterization of samples. This includes three dry etchers with a range of capabilities, while characterization ...

Fundamentals of micromachining and microfabrication techniques, including planar thin-film process technologies, photolithographic techniques, deposition and etching techniques, and the other ...