The manufacturing of MEMS devices entails three sequential steps: depositing a thin film, patterning the film with a temporary mask, and then etching the film through the mask. This cycle is ...

The fabrication of microelectromechanical systems uses some of the same processes and tools used to fabricate integrated circuits (e.g., deposition, photolithography, etch). However, MEMS technology ...

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized devices. We are collaborating with Prof. Victor Bright’s ...

Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...

It combines the chemical reactivity of reactive species with the physical bombardment of energetic ions to achieve highly anisotropic and selective etching of materials. RIE enables the precise ...