2 Rotating cylinder spatial ALD/MLD reactors for depositing on flexible substrates and extendable to roll-to-roll processing. Hot-Wall Viscous-Flow Reactors with In Situ Quartz Crystal Microbalance ...

These reactors are especially well suited for ALD process development. These tools can handle a wide variety of solid and liquid precursors, as well as gases such as H2, O2, O3, H2S and NH3. The ...