ALD能够在原子层面上精确地沉积薄膜,就如同用最精细的画笔在芯片上绘制图案,这种特性使其在第三代半导体材料(如碳化硅SiC和氮化镓GaN ...
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AZoM on MSNBeta-Phase Gallium Oxide Films Using Plasma-Enhanced Atomic Layer Deposition (PEALD) at 200°Cpositioning β-Ga₂O₃ as a viable alternative to SiC and GaN in the field of wide-bandgap semiconductors. Image Credit: ...
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