ALD能够在原子层面上精确地沉积薄膜,就如同用最精细的画笔在芯片上绘制图案,这种特性使其在第三代半导体材料(如碳化硅SiC和氮化镓GaN ...
positioning β-Ga₂O₃ as a viable alternative to SiC and GaN in the field of wide-bandgap semiconductors. Image Credit: ...