其实是清华大学赵午教授提出的SSMB-EUV光源。SSMB是稳态微聚束（Steady-State Micro-Bunching），EUV是极紫外（Extreme Ultra-Violet），SSMB-EUV是一种同步辐射光源。这些术语原本公众听不懂，但在特定的条件下居然成了热词。 不过，SSMB-EUV光刻厂究竟处于什么状态？

Extreme-ultraviolet (EUV) lithography at 13.5 nm is expected to be introduced in high-volume semiconductor chip production over the next three years. Research is now underway to investigate sub-10 ...