Photolithography at a wavelength of 193 nm in the deep UV with ... will be used to print features with half-pitches of 32 nm and 22 nm? An obvious choice is a switch to EUV lithography operating ...

Currently, the three main companies involved in the development of sources for EUV lithography are Cymer, Philips Extreme UV and Gigaphoton. All three are developing sources based on tin plasmas ...

Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Download Brochure The EVG610 UV nanoimprint lithography tool ...

Let us help you with your inquiries, brochures and pricing requirements Request A Quote Download PDF Copy Request A Quote Download PDF Copy Request A Quote Download ...