Abstract: A new high energy implanter, the NV-GSD-HE3, improving upon the design concepts of the industry-leading GSD/HE series, has been developed in order to meet new and future …

Axcelis ® GSD/HE ™ and VHE ™ systems were designed to deliver exceptional productivity, lowest COO, and unmatched process flexibility. The tools provide the broadest range of ion …

2023年3月1日 · The GSD platform is the industry benchmark for the longest manufactured and supported batch ion implanter. The Ovation™ is the latest batch configuration designed to …

Area：Ion Implant MFG：Axcelis/Eaton Type：NV-GSD/HE-VHE. HIGH ENERGYION IMPLANTER SUMMARY SPECIFICATION

2011年1月7日 · The UHE is an ultra‐high energy implanter developed by SEN Corporation. It was derived from the NV‐GSD‐HE3 by adding six RF resonators to the beam line. This extends …

AXCELIS NV-GSD HE. Wafer size. 200mm / 8" 1. SOURCE Module. Gas Box: Gas line #1: HP(Ar) Gas line #2: HP (BF3) Gas line #3 : SDS PH3 Gas line #4: SDS ASH3 Isolation …

eaton nova/axcelis nv gsd-he是一种离子植入器和监测器，具有先进的高功率射频和激光技术，用于各种植入物应用的精确、均匀的植入物深度、剂量控制和可重复操作。

中国科学院苏州纳米技术与纳米仿生研究所拥有落锤冲击试验机、3D共聚焦显微镜、DxFLEX流式细胞仪、场发射透射电镜、光电测试系统、飞行时间二次离子质谱仪、Loomis解理机激光 …

EATON NOVA / AXCELIS NV GSD-HE is an advanced ion implanter and monitor with high-performance features such as a high-efficiency ion source, adjustable shutter, and real-time …

The NV-GSD/VHE delivers beam currents of B+ in excess of 1 pmA at energies approaching 1.7 MeV, B++ to energies approaching 3 MeV and P+++ energies approaching 5 MeV. The …