X-ray reflectivity (sometimes known as X-ray specular reflectivity, X-ray reflectometry, or XRR) is a surface-sensitive analytical technique used in chemistry, physics, and materials science to characterize surfaces, thin films and multilayers.

2023年12月11日 · X射线反射率（X-ray reflectivity，XRR）是一种分析薄膜厚度、粗糙度、密度的表面分析方法。 XRR的基本原理是利用X射线在薄膜表面及界面的反射及折射光的相互干涉，它和我们了解的XRD的衍射原理无关，因此XRR不止可以分析结晶薄膜，也可以分析无定形薄膜。

X-ray reflectivity Fresnel reflectivity: • Simples case of reflection of x-rays from a single interface • Solve Helmholtz equation: propagation of light through medium characterized by refractive index Solution = plane wave: 𝐸 =𝐴 ⋅ − :𝜔𝑡−𝐤𝑗 ; Electro-magnetic field must be continuous at the interface!

Ki is the direction of incident X-ray, pointing to sample. The recorded image is the reflected beam intensity image. Two methods get the similar result for Sb deposition on Si (100).

An accurate X-ray reflectivity curve is defined by clear appearances of the total reflection critical angle, the period and the amplitudes of the oscillation.

2023年10月31日 · XRR是一种方便、快速的分析单层或多层薄膜和表面的方法，是一种纳米尺度上的分析方法，同时可实现无损分析。 例如，通过原子层沉积 (ALD)技术沉积的薄膜可以用XRR表征薄膜的厚度、密度和界面的粗糙度，同样也适用于其他方法制备的薄膜，如通过分子层沉积 (MLD)沉积的有机/无机超晶格。 与光学椭偏法不同，该方法不需要预先了解薄膜的光学性质，也不需要假设薄膜的光学性质。 然而，XRR不能提供有关材料晶体结构的信息，并且多层膜只能 …

Specular X-ray Reflectivity • A non-destructive, routine technique, used for estimation of density, thickness and roughnessof thin film structures (single layer and multi-layered) • Based on total external reflection of X-rays from surfaces and interfaces • Can be used with amorphous, crystalline and liquid samples

Mostly three reflection types are distinguished: Total external reflection. When X-rays enter matter under grazing incidence, they will be reflected by Total External Reflection (TER) when the angle of incidence is below the critical angle αcritical. The critical angle can be …

In this chapter, we present the technique of specular X-ray reflectivity and show through various examples how it can be used to determine the electron density profile (EDP) and the roughness of the interfaces.

chapter, we present the technique of specular X-ray reflectivity and show through various examples how it can be used to determine the electron density profile (EDP) and the roughness of the interfaces.