AX7695 integrates a quartz vacuum chamber, RF power supply and all necessary controls into a compact, self-contained unit for easy installation directly on the tool process chamber for an …

The R*evolution® V remote plasma source integrates a uniquely designed, actively cooled quartz torus plasma chamber, an RF power supply, intelligent power control, and EtherCAT® …

MKS R*evolution® III Remote Plasma Source AX7695 是一款用于半导体晶圆加工的远程等离子体源。 它采用创新的射频 (RF) 功率源和腔室设计，可提供高密度、均匀的等离子体，适用于各 …

2024年1月5日 · 用Matlab实现调制解调的模拟,详细介绍了FSK,ASK,PSK三种调制与解调的对比，加入了信噪比，比较了相干与非相干解调的特点

是否进口:否，品牌:MKS ASTEX，型号:AX7695PSK-11，输入电压:200-208（V），频率范围:50/60（HZ），产品认证:CE，适用范围:semiconductor，电源名称:R*evolution III。 我们还 …

R*evolution® III integrated remote plasma source provides the highest performing and cleanest source of reactive gas required for semiconductor wafer processing.

2023年6月17日 · 2PSK调制原理如下图所示，和2ASK调制原理相似，只不过 基带 码元是双极性不归零码，基带码元d (t)和高频载波相乘实现2PSK信号的调制。 2PSK的解调原理如下图所 …

2019年5月30日 · 在描述中提到，我们不是简单地使用MATLAB自带的MPSK（Multiple Phase Shift Keying，多相位移键控）模块，而是自行构建了2PSK和4PSK的Simulink系统图，并进行 …

The R*evolution® III integrated remote plasma source, with improved capability over the earlier model, provides the highest performing and cleanest source of reactive gas species required …

The first in a new family of remote plasma sources specifically designed for “on-wafer” applications, the innovative R*evolution III combines MKS’s field-proven, patented Low-Field …