Structural characterization of AlN thin films grown on sapphire by ...
2023年5月31日 · The surface morphology and the phases of the AlN films grown on sapphire wafers with diverse surface orientations were investigated by atomic force microscope (AFM) …
In-situ NC-AFM measurements of high quality AlN(0001) layers …
2015年6月2日 · Thanks to a Non Contact Atomic Force Microscope (NC-AFM) connected under ultra high vacuum (UHV) to a dedicated molecular beam epitaxy (MBE) chamber, the surface …
Low-temperature atomic layer epitaxy of AlN ultrathin films by …
2017年1月3日 · In this study, we make a proposal of a novel technique and concept of ALA in the ALD process to achieve high-quality epitaxial growth of AlN at a low deposition temperature of …
AFM imaging and fractal analysis of surface roughness of AlN epilayers ...
2014年9月1日 · The paper deals with AFM imaging and characterization of 3D surface morphology of aluminum nitride (AlN) epilayers on sapphire substrates prepared by magnetron …
Step-flow growth of Al droplet free AlN epilayers grown by …
2022年6月29日 · Conventional AlN (1000 °C) demonstrates contrasting AFM images between slightly Al-rich and N-rich growth conditions, as shown in figures 7(a) and (b). Although the …
High quality AlN epilayers grown on nitrided sapphire by metal …
2017年2月21日 · Taking into account both AFM and XRD results, it can be found that HT-AlN epilayers grown on 7–100 s nitrided sapphires present better crystallographic quality than …
High-pure AlN crystalline thin films deposited on GaN at low ...
2023年7月1日 · High purity AlN thin films were deposited using PEALD at low temperature and with an additional Ar plasma. Additional Ar plasma enhanced growth rate, reduced impurities, …
High-quality AlN epitaxy on nano-patterned sapphire substrates
2016年11月4日 · We report epitaxial growth of AlN films with atomically flat surface on nano-patterned sapphire substrates (NPSS) prepared by nano-imprint lithography. The crystalline …
Investigation of MOCVD grown crack-free 4 μm thick aluminum …
2021年5月25日 · The structural properties of the AlN were analyzed using atomic force microscopy (AFM), X-ray diffraction (XRD), and Raman spectroscopy. The AFM image of the …
使用退火溅射 AlN 在纳米图案蓝宝石衬底上的 AlN ... - X-MOL
通过透射电子显微镜 (TEM)、原子力显微镜 (AFM) 和 X 射线摇摆曲线 (XRC) 测量研究了 AlN 层的位错湮灭机制和聚结。 从横截面 TEM 图像中，获得的聚结厚度为 1.2 µm。 该厚度比在 …