What is the AG Heatpulse 8800/8108 RTP? The AG Heatpulse RPT is a low-cost Rapid Thermal Processing solution for advanced processing of substrates up to 200mm. It is suitable for silicon wafers or wafers made from exotic materials in a laboratory setting.

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AG Heatpulse Legacy Systems. We support the legacy AG Heatpulse 8108 and 8800 systems with spare parts, field service, and upgrades. The Cortex® control system provides a stable, …

设备型号: AG Heatpulse 8108. 传片方式： Automatic Single wafer. 设备状态: Complete Fully Refurbished. 衬底材料：Si/SiC/GaAs/InP. 材料尺寸：5/6/8inch 圆片. 测温方式：热电偶（200-900℃）或者高温计测温（500-1250℃） 升温速率：10-100℃/S， Susceptor Box: 0-20℃/S. 气路配置： 2 gas lines with 2 MFC. N2,O2 or Ar (可扩展，最多5路气体MFC) 恒温时间：1-600S设定. 温度重复性: + 7°C or better at 1150°C wafer to wafer.

The Heatpulse® 8108 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambient. The system is built for the production environment. It is housed in a compact, through-the-wall frame (which can also be installed stand-alone, if desired).

The AG Associates Heatpulse 8108 system includes a 3-1/2-inch floppy disk drive for process recipe storage. A three-axis industrial robot automates processing by transporting wafers into and out of the process chamber. It uses closed-loop feedback for …

The following are the operating specifications for the AG Associates Heatpulse 8108 Rapid Thermal Processor. • Wafer handling: automatic serial processing, using standard cassettes. • Throughput: Process dependent, approximately 80 wafers per hour (in a null cycle) without flat-finder. • Wafer sizes: 5 inches, 6 inches, and 8 inches ...

The 8108 system includes a 3-1/2-inch floppy disk drive for process recipe storage. A three-axis industrial robot (Equipe ATM-105 with ESC-100 or equivalent) automates processing by transporting wafers into and out of the process chamber. It uses closed-loop feedback for precise motion control and accurate positioning.

设备型号：AGAssociateHeatpulse8108 设备状态：Refurbished 工艺温度范围：200-1250℃ 传片方式：自动传片 基地尺寸：4、6、8inch南京邦禾仪器仪表有限公司

2016年10月19日 · MOS clean/MOS compatible wafers cleaned in boats marked "8108" only allowed in the tool. Use clean green nitrile gloves when transferring MOS cleaned wafers from the MOS area to the 8108.