aln晶圆是高功率、高频电子器件及紫外探测器、紫外激光和深紫外led等光电子器件最优秀的衬底材料，在国防、航空航天、保密通信/无线通信、芯片制造、环保、生物医疗等尖端科技领域具有广泛的应用前景，也是我国正在重点突破的关键战略新材料。

2019年3月19日 · This paper investigates the effect of acoustic wave propagation direction along the a-direction (〈11−20〉) and m-direction (〈1−100〉) on the frequency responses of c-plane AlN based surface acoustic wave (SAW) devices systematically.

2023年2月22日 · Abstract: Surface acoustic wave (SAW) resonators based on aluminum nitride (AlN)/scandium-doped AlN (ScAlN) composite thin films with dual reflection structures demonstrate substantial improvement in acoustic performance. In this work, the factors affecting the final electrical performance of SAW are analyzed from the aspects of piezoelectric ...

2020年7月9日 · Tsarik等人报道了一种采用AlN外延膜制作的AlN / AlGaN / GaN HEMT SAW传感器，使用纳米级T型栅和极低厚度势垒，这种单片多层异质结构（MHS）传感器制作在SiC衬底上，采用MBE生长氮化物层，MHS使用厚度为2 μm的高温AlN缓冲层把HEMT与声电子学功能连接起来，测得的SAW的相 ...

In this paper, the temperature performance of AlN-SAW resonators and AlScN-SAW resonators is studied. They are simulated by COMSOL Multiphysics, and their modes and the S11 curve are analyzed. The two devices were fabricated using MEMS technology and tested using VNA, and the test results were consistent with the simulation results.

2020年11月1日 · In this work, we present a disposable polymeric SAW temperature sensor device working in the GHz range, based on aluminum nitride (AlN) and built on a 125 μm thick film of polyethylene naphthalate. The flexible device has been compared to the same SAW device fabricated onto silicon substrates.

Abstract: This work reports on high-performance surface acoustic wave (SAW) piezoelectric resonators based on a-plane Aluminum nitride (AlN) thin films. Rayleigh SAW resonators with different in-plane orientations on AlN thin film were investigated.

Abstract: For the first time, a surface acoustic wave (SAW) resonator based on the AlN/6H-SiC multilayer structure is designed and fabricated. Firstly, we have succeeded in solving the problem of obtaining AlN (002) on 6H-SiC substrate.

2016年4月12日 · In this work, we report on the design, simulation, and fabrication of the AlN film SAW devices integrated with metal components systematically. The dependence of the acoustic velocity and the electromechanical coupling coefficient of the SAW devices on the AlN film thickness are presented and discussed.

2021年4月27日 · 与AlN薄膜相比，AlScN薄膜材料突破了前者的性能瓶颈，具备更优的压电性能，为新型滤波器，特别是BAW/XBAR/FBAR及薄膜SAW器件的开发提供了关键材料解决方案。 为满足不断增长的行业需求，全球众多研发团队在AlScN薄膜制备技术领域进行了长期探索，并衍生出不同工艺路线。 但是，如何稳定制备出高掺Sc浓度的AlN薄膜，至今仍是全球技术开发人员最具挑战性的任务之一。 AlScN薄膜制备工艺路线及发展现状. 常规制备AlScN薄膜的技术有磁控 …