2020年5月16日 · There are typically two ways to deposit YOF coatings: atmospheric plasma spraying (APS) and suspension plasma spraying (SPS). APS can produce a thick coating with high coating efficiency, but the coating tends to have numerous cracks and pores, making it vulnerable to plasma erosion .

2020年9月9日 · Dense yttrium oxyfluoride (YOF) coating was successfully deposited by suspension plasma spraying (SPS) with coaxial feeding. After deposition for 6 min at a plasma power of 105 kW, the thickness of the YOF coating was 55 ± 3.2 µm with a porosity of 0.15% ± 0.01% and the coating rate was ~9.2 µm/min.

2020年5月16日 · Yttrium oxyfluoride (YOF) coatings were prepared using atmospheric plasma spraying (APS) with commercially available YOF/YF3 powder mixtures; namely YOF 3%, YOF 6%, and YOF 9%.

2024年11月13日 · YOF coatings were prepared utilising America Oerlikon Metco’s APS system, which generates a high-temperature plasma jet by ionising a mixture of argon and hydrogen gas to melt the raw materials and pushes the molten particles onto the anodised aluminium substrate (50 mm × 50 mm × 3 mm), making a 200 μm thick coating.

2023年2月15日 · The plasma etching behavior of the Y 2 O 3 and YOF coating using the atmospheric plasma spraying (APS) technique at different plasma power has been investigated. The comparison of microstructure, macroscopic property, and chemical stability of Y 2 O 3 and YOF-coated was reported in detail.

APS Y2O3 coating is the most widely used corrosion- resistant coating which has a lower etching rate in a plasma environment compared to the substrate material of major semiconductor facilities such as Al and Al2O3 and it can be applied to various facilities.

2024年8月26日 · Yttrium oxyfluoride (YOF) coatings were prepared using atmospheric plasma spraying (APS) with commercially available YOF/YF3 powder mixtures; namely YOF 3%, YOF 6%, and YOF 9%. The etching behaviour of YOF and yttrium oxide (Y2O3) coatings was investigated using an inductively coupled plasma consisting of NF3/He.

2022年4月12日 · To develop the plasma-resistant coating of yttrium oxyfluoride using the suspension plasma spraying (SPS) process, a mixed Y 5 O 4 F 7 /YF 3 suspension was developed for fluorine-rich yttrium oxyfluoride coating.

The atmospheric plasma spray (APS) -Y2O3 coatings are widely used to minimize damage to internal parts of the chamber caused by the strong corrosive effect of...

2021年9月2日 · In this study, to create an ideal plasma-resistant coating, YOF coating was prepared using the AD method, and the plasma resistance to plasma corrosion rate, surface roughness, and chemical composition following plasma exposure was evaluated.