EUV lithography systems - ASML
The dual-stage extreme ultraviolet (EUV) lithography system is the first in a new generation of machines that will provide 8 nm resolution to support advanced Logic and Memory chip production.
TWINSCAN EXE:5000 - EUV lithography systems | ASML
The TWINSCAN EXE:5000 is the first 0.55 NA, or ‘High NA’, EUV lithography system. Its 8 nm resolution will enable chipmakers to print with a single exposure features 1.7 times smaller – and therefore achieve transistor densities 2.9 times higher …
5 things you should know about High NA EUV lithography - ASML
2024年1月25日 · After a decade of R&D, ASML shipped the first modules of the first High NA EUV lithography system to Intel in December 2023. The TWINSCAN EXE:5000 represents a significant step forward for cutting-edge chip manufacturing.
Extreme ultraviolet lithography - Wikipedia
It is a type of photolithography that uses 13.5 nm extreme ultraviolet (EUV) light from a laser-pulsed tin (Sn) plasma to create intricate patterns on semiconductor substrates. As of 2023, ASML Holding is the only company that produces and sells EUV systems for chip production, targeting 5 nanometer (nm) and 3 nm process nodes.
ASML soon to deliver high-NA-EUV machine for mass production
2025年1月30日 · ASML will deliver the first high-NA-EUV chip production machine for mass production in the coming months. This slightly specifies the previously communicated delivery of 2025.
How ASML Is Redefining Technology, One Nanometer at a Time
2025年1月16日 · With plans to deliver high numerical aperture EUV machines by 2025, ASML is poised to enable breakthroughs in AI, quantum computing and sub-2 nanometer transistor technologies.
Inside ASML, the company advanced chipmakers use for EUV lithography - CNBC
2022年3月23日 · ASML is the only manufacturer of EUV lithography machines, which revolutionized semiconductors. Here's an inside look at the company relied on by chipmakers.
ASML Shows Off Next-Generation, $380 Million High-NA EUV …
2024年2月14日 · The company's newest lithography tool weighs a staggering 165 tons and will cost up to $380 million, roughly double the price of its previous low-NA EUV lithography machines.
The $150 Million Machine Keeping Moore’s Law Alive - WIRED
2021年8月30日 · ASML’s latest EUV machine promises to keep alive an idea that has come to symbolize the march of progress—not just in chipmaking, but in the tech industry and the economy at large.
This Machine Could Keep Moore’s Law on Track - IEEE Spectrum
2023年7月29日 · The first high-NA EUV system, the ASML EXE:5000, will be installed in a new lab that we’re opening jointly with the Belgium-based nanoelectronics research facility Imec, in early 2024.
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