Extreme ultraviolet holographic lithography: Initial results
2007年1月12日 · A natural extension of EUV-IL can be EUV holographic lithography (EUV-HL), where a computer generated hologram (CGH) patterned on a suitable carrier is used to project an image on a given substrate. This approach has the great advantage of not relying on complex optical systems to form the image.
We report the demonstration of Extreme Ultraviolet Holographic Lithography – EUV-HL – using a compact table top extreme ultraviolet laser. The image of the computer-generated hologram (CGH) of...
ZYGO corporation got contracted to build several EUV-L Micro-Field Exposure Tools with 0.5NA, known as MET5. –Those tools are used for infrastructure development required for the EUV lithography industry to support printing at the ~12nm node …
Experimental setup used for EUV-HL. - ResearchGate
In this review paper, various EUV imaging techniques, such as 2D and 3D holography, EUV microscopy using Fresnel zone plates, EUV reconstruction of computer generated hologram (CGH) and ...
Extreme UltraViolet Holographic Lithography with a Table-top …
2009年3月1日 · We report the demonstration of Extreme Ultraviolet Holographic Lithography - EUV-HL - using a compact table top extreme ultraviolet laser. The image of the...
Investigation of outgassing of EUV resist (pressure, different components, different concentrations, species ) Ref: SCIENCE CHINA Chemistry, 57(12),1746,(2014).
euv 光学技术的 发展为与之有相似研究平台的科学领域, 如空间 光学、x 射线显微镜、等离子体诊断等技术的进步 提供了支持。本文详细介绍了现有euvl实验样 机及其光学系统的参数特性, 总结了euv 光学系 统设计原则, 深入讨论了euv投影曝光系统及照 明系统设计 ...
ptychographic imaging method bridges the gap between CDI and STXM by measuring a set of diffraction patterns at each point of a STXM scan. Advantages: -Very high resolution (for HXR ~10-20nm) for test samples. Resolution limited by geometry, . Martin Dierolf et al. New J. Phys. 12, 035017 (2010) Reconstruction results. Part of 3-D reconstr.
(PDF) EUV Holographic Lithography with Table-Top Laser
A natural extension of EUV-IL is EUV holographic lithography. In this approach a computer-generated hologram (CGH) is used to form the image of an arbitrary pattern and to activate a photoresist. This approach has the advantage of simplicity, because it does not rely on any complex optical systems to form the image which are particularly ...
In this review paper, various EUV imaging techniques, such as 2D and 3D holography, EUV microscopy using Fresnel zone plates, EUV reconstruction of computer generated hologram (CGH) and generalized Talbot self−imaging will be pre−