2012年9月20日 · Reliability characterization is studied on CrSi Thin Film Resistors (TFRs) to understand the reliability behaviour of CrSi Thin Film Resistors. Current sweep is performed on TFRs structures to determine current density threshold …

In audio products requiring small size, low distortion, or excellent matching, on-chip thin-film resistors (TFRs) can provide superior performance compared to discrete resistors. TFRs are formed by first depositing a thin layer of a resistive material, typically a metal alloy, onto a substrate such as a silicon wafer.

2022年6月10日 · To improve anticrystallization and thermal stability, materials that add carbon to Cr–Si such as Cr–Si–C, 23) CrSi 2 –Cr–SiC, 24, 25) and CrB 2 –Si–SiC 26) have been proposed. These Cr–Si–C thin films have a low TCR of −50 to near zero ppm °C −1 and a high resistivity of over 0.5 mΩ cm.

2022年12月1日 · Electrical properties of CrSi thin films are modeled considering phase transitions and grain growth during annealing. The effective medium approximation is used to calculate the electrical resistivity of the film which comprises several phases including grain boundaries.

Abstract: CrSi thin films are deposited on SiO2 by reactive magnetron sputtering in a mixed atmosphere of argon and nitrogen, where nitrogen is the reactive gas, following by annealing in nitrogen and hydrogen at different temperatures. The effects of sputtering atmosphere (nitrogen flow rate) and annealing temperature on film structural and ...

in film chip resistors are component materials and preparation methods of resistance films. Resistance films on thick. film chip resistors are prepared as follows: resistor pastes thickness less than 1 μm [6]. At present, the main problem in developing thin film chip resistors is that TCR is too high to meet requirem.

2013年11月20日 · Abstract: We investigated the characteristic variation of an integrated thin-film resistor (TFR), which is composed of silicon chromium (SiCr), according to process conditions and its effects on analog circuits. To improve TFR properties, such as temperature coefficient of resistance (TCR) and mismatch, the integrated TFR was examined under ...

2016年1月1日 · The temperature coefficient of resistance (TCR) of single-layer Cr-Si thin-film resistors was negative and the TCR value of single-layer Ni-Cr thin-film resistors was positive. For that, we...

Reliability characterization is studied on CrSi Thin Film Resistors (TFRs) to understand the reliability behaviour of CrSi Thin Film Resistors. Current sweep is performed on TFRs structures to determine current density threshold before catastrophic resistance degradation.

The document analyzes the reliability of CrSi thin film resistors through current stress testing. It characterizes the current density threshold and resistance change over time at different currents. Two models are proposed to predict resistor lifetime based on current density: an exponential law model and a power law model.