Two features combined to support a high-average-power, high-repetition-rate or continuous-wave and narrow-band radiation, at wavelengths ranging from the THz region to the EUV. 154801 …

2023年7月27日 · We investigate a previously unconsidered mitigation geometry consisting of a magnetic null by performing full-orbit integration of the ion trajectories in an EUV system with …

The EUV source, based on a discharge-produced plasma in tin vapor, irradiates samples in a clean vacuum chamber. The latter is designed for the investigation of surface and volume …

In extreme ultraviolet (EUV) lithography, plasmas are used to generate EUV light. Unfortunately, these plasmas expel high-energy ions and neutrals which damage the collector optic used to …

2020年11月1日 · An LPP EUV source is one of the most powerful EUV sources for triggering material ablation. Broad EUV light ranging from 7 to 22 nm is generated by focusing a pulsed …

2023年7月20日 · We investigate a previously unconsidered mitigation geometry consisting of a magnetic null by performing full-orbit integration of the ion trajectories in an EUV system with …

We are developing 250W EUV source. 15W* (100kHz) EUV power in burst (50% duty) was achieved. CE is 1.5%. Now we are improving CE >2.5% by optimizing shooting conditions. …

Key components of this EUV light source system from Gigaphoton include a magnetic debris mitigation system, a high power short pulse CO2 drive laser system, a unique pre-pulse laser …

2013年4月1日 · The use of magnetic fields to deflect ionic debris has been proposed and is investigated here. In this paper, we present a detailed computational model of magnetic …

Magnet lattice design and optical enhancement cavity development for the envisioned Tsinghua EUV SSMB storage ring is ongoing, with very good progress achieved. D. F. Ratner and A. W. …