The ELS-7010 is one of the leading enablers of new memory architectures such as 3D NAND and is trusted for producing the bulk of layers for Internet of Things and automotive chips. It is also used around the world for high volume manufacturing for patterning the non-critical layers for the most advanced chips due to its cost efficiency.

The ELS-7010 is one of the leading enablers of new memory architectures such as 3D NAND and is trusted for producing the bulk of layers for Internet of Things and automotive chips. It is also used around the world for high volume manufacturing for patterning the non-critical layers for the most advanced chips due to its cost efficiency.

ELS 7010 and XL series Neon gas mixtures are used to fuel the discharge • Bi-mix: Ar/Ne, Kr/Ne • Tri-mix: Ar/F 2 /Ne, Kr/F 2 /Ne Reduce Neon gas usage and completely remove the need for Helium

In July 2010, we introduced the ELS-7010x which allows customers to easily adjust power from 30 watts to 50 watts based on the changing wafer design requirements and production needs.

In 2010, we introduced the ELS-7010x which allows customers to easily adjust power from 30 watts to 50 watts based on the changing wafer design requirements and production needs.

2010年7月14日 · Cymer, Inc. (Nasdaq: CYMI), the market's leading developer of light sources used to pattern advanced semiconductor chips, announced today the introduction of the ELS (TM) 7010x, the world's first field-selectable 30 to 50 watt (W) Krypton Fluoride (KrF) light source.

Cymer introduces its best-selling KrF light source, the ELS-7010, with 40W of output power for high-volume production at the 100nm production node and below. Later the same year the XLA 200, the world’s first excimer laser light source, is ready for 45nm immersion lithography.

2010年7月14日 · An extension of Cymer's highly reliable ELS 7000 series product, the ELS 7010x provides significant advancements in power flexibility and performance stability, enabling increased wafer...

OnPulse Plus is available for all XL-series and ELS 7000 and 6000 series. SmartPulse is available for all XL-series light sources. Cymer is developing a new generation of light source to enable advanced lithography beyond the capability of DUV light sources.

V. 7000/7010 SSPPM Cymer developed the 7000 series light source product line to operate at rep-rates of up to 4 kHz. The KrF version (ELS-7000) would generate 30 W of 248 nm light while the ArF version (Nanolith 7000) would provide 20 W of 193 nm light. In addition to the higher light source output power levels, this generation also delivered ...