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Etching methods for texturing industrial multi-crystalline silicon ...
2022年5月1日 · Texturing process in combination with anti-reflective coating (ARC) is used for suppressing the unavoidable front surface reflection from the Si surface. Amorphous silicon nitride (SiN X) is the commonly used ARC for both c-Si and mc-Si p-type wafer based solar cells.
Wet chemical etching of silicon for conically textured surfaces
2024年1月31日 · We disclose a method for the wet chemical etching of silicon (001) surface with a conical texture. This method involves a single-step etching process without additional surface treatments. The conical texture is compared to the pyramidal texture resulted from conventional chemical processes.
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Etching methods for texturing industrial multi-crystalline silicon ...
2022年5月1日 · Anisotropic etch properties of potassium hydroxide (KOH) or sodium hydroxide (NaOH) solutions towards < 100 > crystallographic plane over < 111 > plane is utilized for texturing c-Si wafers. The etch selectivity of these alkaline solutions ranges up to a few hundred depending on the solution composition and process conditions [2], [3], [4].
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