FOUP Buffer (FOUP Handling Robot) | Industrial Transfer Robots …
It has two robot arms to greatly shorten the Foup delivery time. Number of Foups to be stocked is more than 20, and it has the foldable z-axis structure which is tailored to the height regulation …
3D NAND 学习笔记--晶圆传送 wafer transfer - 知乎
在芯片制作过程中，免不了要谈到晶圆传送。 在此以LAM E6机台作为案例介绍芯片制作过程中wafer transfer flow。 MES 派工后，内含25片wafer的FOUP（Front Opening Unified Pod，前 …
Mobile robot for 300mm FOUP transportation and handling tasks Our HERO®FAB series combines an established, clean and safe 6-axis robot system with a free-moving vehicle. It is …
晶圆盒传送存储系统 Stocker-北京华丞电子有限公司
300mm 晶圆盒传送存储系统主要由晶圆盒FOUP载入系统LoadPort、晶圆盒缓存架Shelf、机械手Robot、全密封式FIMS、气动系统以及电控系统等部分组成。 实现晶圆盒FOUP的载入载出、 …
ROBOT - 三和技研股份有限公司
Steady transfer with unique clamping devices and optimized speed. Dirty and clean batches separated by isolating front end/back end (dirty/clean) wafers with separate touch areas. …
Semiconductor | FOUP Handling Robot | Robots and Design
Robots and Design’s FOUP Handling Robot, mounted to an AGV (Automated Guided Vehicle), handles 12” FOUP. The maximum payload is 25kg, and it has a wide motion range with …
Mobile Cobot 解決方案/i-Operator(Model: iTS-FOUP/FOSB)-友上 …
機械手最大負載重量10/12kg（不包含夾爪） 可搭配 FOSB/FOUP 夾爪與層架，最大儲位數為2 充電時間40min (20%~100%) 可選配「自動電池交換站」，更換電池時間2min。 符合SEMI S2 …
Auto teaching system and method of foup transfer robot
2019年12月5日 · The present invention discloses an automatic teaching device for an FOUP transport robot that enables automatic teaching of the loading or unloading position of an …
FOUP Stocker Systems | Innovative technologies (Robotics, …
Genmark's next-generation FOUP Stocker systems incorporates advanced robotics featuring highly optimized blended motions and control software technology to achieve fully automation …
FV501 Series - 三和技研股份有限公司
FOUP Handling Robot Extremely thin wall mount base to ensure easy application. FOUP holding by bottom clamper. High stroke long reach range to 3 columns of FOUP array. Top Speed in …
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