We have used transmission electron microscopy, high-resolution Rutherford backscattering spectrometry (HRBS), and angle-resolved X-ray photoelectron spectroscopy (ARXPS) to investigate the...

Peaks in the Hf4f region have an asymmetric peak shape for hafnium metal. Hafnium compounds, such as the oxide, have symmetric Hf4f peaks. Hafnium oxide is reduced by an argon ion beam to form a continuum of oxidation states. Use lowest beam energy possible for profiling or cluster source to clean top surface.

Hafnium is a transition metal with a valance of (IV) and forms a single oxide HfO2. The intensity ratio of the Hf 4f 7/2 and Hf 4f 5/2 peaks are constrained to 4:3. The two peaks are separated by a value of D= 1.71 eV [1]. The Hf 4f 7/2 binding energy for the metal is found at 14.3 eV and is fit with an asymmetric peak-shape.

Peaks in the Hf4f region have an asymmetric peak shape for hafnium metal. Hafnium compounds, such as the oxide, have symmetric Hf4f peaks. Hafnium oxide is reduced by an argon ion beam to form a continuum of oxidation states. Use lowest beam energy possible for profiling or cluster source to clean top surface.

Primary Peak (XPS Signal) used to measure Chemical State Spectra: Hf (4f7/2) at 14 eV Recommended Pass Energy for Measuring Chemical State Spectrum: 40-50 eV (Produces Ag (3d5/2) FWHM ~0.7 eV)

2022年9月1日 · The Hf 4f XPS spectra show the dominant Hf–O bonds (O-Hf-O) that correspond to the high intensity of Hf4+ 4f 7/2 and Hf 4+ 4f 5/2 peaks [35, 36]. The low intensity of the Hf 4f sub-oxide peaks indicates the presence of sub-oxide bonding, Hf–O non-lattice bonds, or defects.

In this study, a bilayer HfO2/ZrO2 thin film structure was deposited by radio frequency sputtering at room temperature (RT) to investigate the resistive switching (RS) characteristics, mechanism as...

Figures 2a and 2b show the Hf 4f and O 1s XPS spectra, respectively, at the 5th, 10th, 20th, and 30th process cycles.

2007年6月15日 · The factor-analysis results show that the Hf 4f spectra of HfH 1.92 oxidized in the XPS chamber with the high-purity oxygen or the residual gases in the UHV are explained with summation of those of the HfH 1.92 and HfO 2.

XPS Spectra Hafnium (Hf) Compounds The XPS Spectra section provides raw and processed survey spectra, chemical state spectra, BE values, FWHM values, and overlays of key spectra. Atom% values from surveys are based on sample, as received, and Scofield cross-sections. Atom% values are corrected for IMFP and PE.