2020年6月24日 · fitok igs 模块化气体系统采用符合 semi 标准的表面安装元件，进行模块化设计，在缩小设备体积的同时，安装和维护反而变得更简单。 模块化气体系统（IGS） | FITOK,飞托克

IGS (Integrated Gas Supply) Panel 자체 설계능력 사실상 국내 유일 C-seal 전문 업체로 10년간 1000대 이상 제작 판매 실적

2020年6月24日 · FITOK Integrated Gas System (IGS) adopts surface mount components conforming to SEMI standard for modular design, which makes installation and maintenance simpler while reducing the size of the system.

TALON IGS/TMS™ (Talon Modular Systems) Integrated Gas Delivery Systems (IGS) have become the new standard in Gas Delivery Platforms. IGS systems reduce maintenance times and improve uptime, and the Talon IGS (called TMS®, Talon Modular System) has become the industry standard for gas and liquid delivery systems.

igs标准通气基座采用模块化设计，具备符合semi标准的可靠的密封与耐腐蚀能力。 用户根据不同的气体配置需求，可构建紧凑的并方便安装维护的气体传输系统结构。

．Design structure of IGS (Integrated Gas Supply) Panel itself. ．PFK is only one Korean corporation specialized in C-seal in fact, and has sold more than 1000 set during 10 years. W-seal is needs special care for other components and delivery time. ．By minimalizing installation space, can save footprint and space.

IGS Integrated Gas Systems / 集成式供气系统 IGS系统 基座 —— VIB 系列 产品特点 • W型密封和C型密封可选 • 非固定安装，保证密封效果 • 浸润表面EP处理 • 表面光洁度: Max. 5μin. Ra 基础板 凸缘板 复合板 托架 *其他型号请咨询厂家，请参考详细尺寸图。

UNILOK provides IGS gas boxes and IGS valve regulators for integrated gas systems that are designed to control and regulate gas flow in industrial gas systems.

FITOK 模块化气体系统 (Integrated Gas System) 是一种用于半导体行业气体控制的集成系统,集成了阀门、接头等管道元件以及其它必要的测量与控制仪器。 模块化气体系统采用符合 SEMI 标准的表面安装元件,进行模块化设计,在缩小设备体积的同时,安装和维护反而变得更简单。 体积约为传统面板的 1/3, 流道尺寸相应缩小, 有利于控制沾污。 每个密封面都有检漏孔。 IGS 系统选用镀银螺栓安装,防咬死。 镀银螺栓可单独订货,型号: BL-M4×10 (长 10 mm) BL-M4×30 (长 30 mm)更多 …

BIS gas panel is direct type gas system with the latest technology adopted. This has valve body Plug-in structure and the Center Lock. It is perfectly sealed and removable with a simple operation. Combined with U-shaped middel joint, no mechanical sealing is made. Strong against external force and has high reliable sealing ability.