2020年6月24日 · fitok igs 模块化气体系统采用符合 semi 标准的表面安装元件，进行模块化设计，在缩小设备体积的同时，安装和维护反而变得更简单。 模块化气体系统（IGS） | FITOK,飞托克

태광후지킨은 반도체 및 FPD 제조 공정에 필수적으로 사용되는 고청정 Valve, Fitting, Regulator, Gas Filter, IGS 및 GAS BOX 등의 다양한 제품군을 개발, 제조하고 있습니다.

2020年6月24日 · FITOK Integrated Gas System (IGS) adopts surface mount components conforming to SEMI standard for modular design, which makes installation and maintenance simpler while reducing the size of the system.

TD/TCD C-seal IGS valve. IGS表面貼裝閥，旨在減少氣棒的佔地面積並易於維護。 特性: 這些閥門是表面安裝型隔膜閥，與1.125“C-SEAL兼容。 該系列中的手動和氣動閥都包含一個緊湊的執行器，使閥門適合細線間距。

VIM - IGS Flow Control Valves. Product FeaturesProduct Features. W-seal and C-seal optional. The wet surface is treated with EP, Max. 5μin. Ra. 100% Helium-leak-tested. ParameterParameter. Max. Working Pressure. 150 psig. Max. Working Temp. 14℉~302℉(-10℃~150℃) Nominal Diameter. Ф1.0. Flow Capacity.

All valves are helium leak-tested (vacuum method, actual value). Inboard Leakage: 5x10 Pa・m 3 /sec, Seat Leakage: 5x10 -12 Pa・m 3 /sec PCTFE Seat Material PA Seat Material

UNILOK provides IGS gas boxes and IGS valve regulators for integrated gas systems that are designed to control and regulate gas flow in industrial gas systems.

TK-FUJIKIN has been supplied valves, regulators, gas filters, gas sticks and IGS (Integrated Gas System) of the gas panel through localization of UHP fittings in Semiconductor and FPD applications, which all components had been relied on imported products so far, and also, has well-known company as specializing in parts, that has been ...

Valve Features. These valves are diaphragm valves of Surface Mount type, and are compatible with 1.125" C-SEAL. Both manual and pneumatic valves in this series incorporate a compact actuator, which allows the valve to suit to fine line pitches. The manual valves are 90° open/close types, and capable to equip a lock key for preventing miss ...

AP Tech manufactures a broad selection of diaphragm valves from ¼ inch through 1 inch line sizes. Operating pressures from low vacuum to 4,500 psig (310 bar) and a wide variety of manual and pneumatic actuation types, combined with a wide variety of connections, porting choices and monoblock configurations, AP Tech has the valve for high ...