It is a four-target batch sputtering tool for both front and backside deposition, providing high utilization that increases cost-effectiveness and productivity. The 943ix and 954ix are two of KDF’s x Series™ products.

KDF Clientele; Worldwide Locations; Careers; Products. custom product dropdown. PVD and Sputtering . KDF In-Line Solutions . KDF Sputtering Technology. Sputtering Products Overview. 600i Series Sputtering System. 744i Sputtering System. 844i Sputtering System. 900i Series Sputtering System.

Fax 201-784-0202 www.kdf.com v1.30-4/13/21 903i The 903i is targeted at contact metallurgy processing because of its pure metal target deposition and convenient wafer to pallet loading abilities, for sputter down applications. The base 903i with its rough pumped load lock allows users to achieve fast production exchange cycles. 943i

High-rate DC magnetron sputtering, single pass or multiple pass deposition and dual-level high vacuum pumped load lock features support the versatility and high-throughput of these production systems. Cathode and wafer orientation are horizontal, allowing the sputtered material to be transferred vertically.

The 900 Series features dual load lock, in-line, sputter down, batch systems configured with an optional high vacuum load lock and three or four target positions.

2008年8月6日 · 适用于对饱和蒸汽、过热蒸汽流量测量进行比较精确的温度和压力补偿；在一定精度范围内可以对一般气体和蒸汽的流量测量进行温度和压力补偿。 按显示的方式分为：数码管式显示、液晶式显示。 如需了解更多信息,请访问 (上海肯特智能仪器有限公司)官网 http://www.shanghaikent.com.

kdf智能流量积算仪的主要技术指标. 显示方式：双排同时显示，上排四位数码管显示瞬时流量，下排八位数码管显示累积流量采样周期：0.5s. 报警输出：瞬时流量二限报警，继电器输出触点容量 ac220v/3a. 变送输出： 4～20ma、0～10ma、1～5v、0～5v 精度：±0.3%fs

The 900 series includes the 903i, 943i, 943ix, 954i, and 954ix The 954i and the 954ix offer up to four-target capability. The ix series systems offer an extended sputter area for increased process uniformities utilizing KDF's "X-series"™ cathodes.

2023年4月19日 · KDF introduces the 5 Pallet Stacker option for the KDF 900i Series Batch Sputtering Systems. This new option allows for 5 pallets to be loaded into the system Load Lock where they are automatically indexed in and out for processing in the main deposition chamber.

KDF 904i 1.Rockwell Automation programmable controller and KDF industrial PC with Windows 10 for application graphics displayed on 24" flat panel touch screen. 2.Software downloads and remote system diagnostics available through Webex or GoToMyPC internet connections.