Defect Inspection & Review | Chip Manufacturing | KLA
The 3935 and 3920 EP broadband plasma defect inspection systems support wafer-level defect discovery, yield learning and inline monitoring for ≤5nm logic and leading-edge memory design …
KLA's Broadband Plasma Products Legacy | Innovation | KLA
2024年5月30日 · Our latest broadband plasma inspection systems include the 3935 Super Resolution Broadband Plasma Patterned Wafer Defect Inspection System and 2965 …
Products A to Z - KLA
View KLA's A to Z product listing of inspection, metrology and data analytic systems for chip, reticle, packaging, compound semi and HDD manufacturing.
KLA-Tencor: Having Fun with LSPs and Beyond At K-T, we are pushing LSP performance to orders of magnitude higher brightness and power than alternative broad-band CW source in …
These features include a high numerical aperture (NA), a tunable illuminator covering DUV, UV and visible wavelengths, selectable optical aper-tures, and advanced automatic defect …
揭秘顶尖科技前沿_4---KLA半导体设备全览-安徽锐芯智研半导体科 …
2024年9月3日 · CryoTemp晶圆旨在校准、改善均匀性和匹配静电吸附盘 (ESC)上的温度曲线，可实现对等离子体蚀刻腔体的快速工艺表征和控制. 监测并记录晶圆在设备传送路径上的振动和 …
KLA BBP 40th Anniversary
For 40 years our broadband plasma (BBP) patterned wafer inspectors have been at the forefront of defect discovery for the semiconductor industry. Introduced in 1984, the KLA 2020 was the …
KLA-Tencor 推出晶圆全面检测与检查系列产品-AET-电子技术应用
2016年7月12日 · 革命性的 3900 系列宽波段等离子光学检测仪采用新型超分辨率深紫外线 (SR-DUV) 波长范围和光刻机级别的机台精准性产生卓越的光学分辨率，经证实能够侦测 10 纳米以 …
[半导体检测-3]：半导体检测领域的领头羊KLA科磊的产品线_kla半 …
2024年9月25日 · 半导体检测领域的领头羊KLA科磊（简称KLA）的产品线广泛且深入，覆盖了半导体制造和相关电子行业的多个关键环节。 KLA的产品线主要包括用于检验、测量、数据分析 …
Metrosemi 3900 Series Wafer Defect Inspection And Review …
In advance of SEMICON West, KLA-Tencor Corporation (NASDAQ: KLAC) was introduced advanced wafer defect inspection and review systems for leading-edge IC device …
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