KLA-Tencor™ 宣布推出用于基板制造和集成电路工艺监测的 新型 Surfscan® SP3 缺陷与表面质量检测系统. 独有的深紫外检测灵敏度、业内领先的检测通量. 促进了 28 纳米及以下节点集成电路的制造 【加州 MILPITAS 2011 年 7 月11 日讯】今天， KLA-Tencor CorporationTM (NASDAQ:

As the first unpatterned wafer inspection platform to incorporate deep-ultraviolet (DUV) illumination, the Surfscan SP3 systems feature dramatic advances in sensitivity and throughput over their industry-benchmark predecessor, the Surfscan SP2XP. The Surfscan SP3 platform is also designed for extension to the next wafer size: 450mm.

7月11日，KLA-Tencor CorporationTM (NASDAQ: KLAC) 宣布推出新一代的 Surfscan® 系列晶圆缺陷与表面质量检测系统—— Surfscan SP3。 Surfscan SP3 系统是首款采用深紫外 (DUV) 光照的无图案晶圆检测平台，与被视为业界基准的前身 Surfscan SP2XP 相比，检测灵敏度与检测通量均 …

Patterned and unpatterned wafer defect inspection and review systems find, identify and classify particles and pattern defects on the front surface, back surface and edge of the wafer. This information allows engineers to detect, resolve and monitor critical yield excursions, resulting in faster yield ramp and higher production yield.

2011年7月11日 · KLA-Tencor's engineers have built the Surfscan SP3 inspection system with the DUV sensitivity and throughput needed to reliably identify critical defects and surface quality issues inline...

sp3 是业界唯一采用深紫外线 (duv) 光照的高灵敏度无图案晶圆检测系统，并且是同 类工具中唯一能够生成高分辨率图像的表面质量检测产品。 Surfscan SP3 450的另一项优势

2024年9月28日 · KLA Surfscan系列设备激光器波长推测. 对于KLA Surfscan SP1、SP3、SP5、SP7等具体型号所使用的激光器波长，虽然无法直接给出确切信息，但可以根据产品升级和技术迭代的一般趋势进行推测： SP1：作为较早的型号，SP1可能主要使用 可见光或较长波长 的UV激光 …

2024年9月25日 · Surfscan SP3是KLA在 2011年推出的新一代晶圆缺陷与表面质量检测系统 。 该系统采用了 深紫外（DUV）光照技术 ， 大幅提高了检测灵敏度和检测通量 。 特点与应用 ：

These include With sensitivity enabled by a deep ultra-violet (DUV) laser source robust haze tolerance to extend the lifetime of test wafers, and high throughput, the Surfscan SP3/Ax system detect a wide integrated SURFmonitor™ for characterizing and measuring range of critical defects and surface quality issues at a low cost wafer surface ...

2012年7月9日 · The Surfscan SP3 is also available in a 300mm-only version and a 300mm/450mm bridge configuration. SP3 models are designed to match among themselves and correlate to previous-generation Surfscan SP2 and SP2 XP systems, preserving the factory's baseline and offering flexibility for routing work in progress.