2022年12月6日 · Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance. Jan 25, 2022. The KLA Instruments™ portfolio of optical profiler tools are widely used in the industry due to their rapid measurement time... Sep 21, 2021.

KLA Instruments provide our customers with our deep technical expertise along with a broad portfolio of metrology and defect inspection solutions.

KLA’s metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high volume manufacturing process monitoring.

KLA Instruments提供一系列轮廓仪、纳米压痕仪、薄膜厚度仪、电阻测量仪以及缺陷检测和量测系统。 对于行业专家、学术界和其他创新者，KLA Instruments提供值得信赖的测量技术，助力世界实现技术上的突破性发展。

2012年4月23日 · Designed for operation in lithography, outgoing quality control (OQC) and other process modules, this new cluster tool monitors the front side, back side and edge of the wafer for defects and, in parallel, measures wafer edge profile, …

KLA Instruments ™ 探针式轮廓仪可能与不同探针一起使用，以优化特定应用的测量。 KKLA轮廓仪，包括Alpha-Step ® D系列、Tencor ® P系列和高分辨率轮廓仪(HRP ® )系列，都采用了相同的探针设计。

The KLA 2020 was the first automated patterned wafer inspection system for chip manufacturing, replacing manual inspection by human operators. Known as a brightfield inspector, the KLA 2020 provided fast and accurate feedback on fab processes, launching the yield management era.

Using enhanced broadband plasma illumination technologies, such as Super•Pixel™ mode and advanced detection algorithms, the 2965 and 2950 EP inspectors provide the sensitivity required to capture critical defects across a range of process layers, material types and process stacks.

KLA’s defect inspection and review systems cover the full range of yield applications within the chip manufacturing environment, including incoming process tool qualification, wafer qualification, research and development, and tool, process and line monitoring.

2024年9月25日 · 半导体检测领域的领头羊kla科磊（简称kla）的产品线广泛且深入，覆盖了半导体制造和相关电子行业的多个关键环节。 KLA 的 产品 线主要包括用于检验、测量、数据分析的系统以及软件等，这些 产品 广泛应用于IC、 晶圆 和掩模的研发和制造过程中。