2022年12月6日 · KLA’s comprehensive portfolio of inspection, metrology & data analytic systems helps manufacturers manage yield through the entire IC fabrication process.

KLA Instruments provide our customers with our deep technical expertise along with a broad portfolio of metrology and defect inspection solutions.

View KLA's A to Z product listing of inspection, metrology and data analytic systems for chip, reticle, packaging, compound semi and HDD manufacturing.

KLA Corporation is an American company based in Milpitas, California that makes wafer fab equipment. It supplies process control and yield management systems for the semiconductor industry and other related nanoelectronics industries.

KLA Instruments提供一系列轮廓仪、纳米压痕仪、薄膜厚度仪、电阻测量仪以及缺陷检测和量测系统。 对于行业专家、学术界和其他创新者，KLA Instruments提供值得信赖的测量技术，助力世界实现技术上的突破性发展。

KLA Instruments提供关于光学轮廓仪、探针式轮廓仪、纳米压痕仪、薄膜厚度仪、方块电阻测试仪以及晶圆缺陷检测和量测系统等仪器应用笔记及相关技术资料

For 40 years our broadband plasma (BBP) patterned wafer inspectors have been at the forefront of defect discovery for the semiconductor industry. Introduced in 1984, the KLA 2020 was the first automated patterned wafer inspection system for chip production, replacing manual inspection by human operators.

2012年4月23日 · The CIRCL suite incorporates a new generation of the industry-proven LDS front side macro defect inspection module; a new, modular edge inspection, profile and metrology module based on KLA-Tencor's flagship VisEdge ™ technology; a dedicated wafer back side inspection module; and a flexible optical defect review and classification module.

KLA’s metrology systems address a range of chip and substrate manufacturing applications, including verification of design manufacturability, new process characterization and high volume manufacturing process monitoring.

The CIRCL™ cluster tool has four modules, covering all wafer surfaces and providing parallel data collection at high throughput for efficient process control.