The Process Probe™ 1730 instrumented wafers enable precise in situ characterization of wafer temperature profiles in photoresist track systems, temperature controlled wafer chuck …

KLA’s wafer manufacturing portfolio includes defect inspection and review, metrology and data management systems that help manufacturers manage quality throughout the wafer …

KLA’s wafer inspection and metrology systems for advanced wafer-level packaging provide the data required for chip manufacturers to increase yield by providing traceability throughout their …

For 40 years our broadband plasma (BBP) patterned wafer inspectors have been at the forefront of defect discovery for the semiconductor industry. Introduced in 1984, the KLA 2020 was the …

The HighTemp-400 wireless wafer measures process tool thermal uniformity, providing temporal and spatial temperature data collected under real production process conditions. By revealing …

2016年7月11日 · These systems employ a range of innovative technologies to form a comprehensive wafer inspection solution that enables discovery and control of yield-critical …

KLA-Tencor (NASDAQ: KLAC) today introduced the Surfscan SP2XP system, a new unpatterned wafer inspection system designed to meet 45nm IC manufacturing requirements for all types …

2014年6月23日 · KLA-Tencor’s CV310i Wafer edge inspection & metrology system is capable of tracking and simultaneously capturing inspection and metrology of the wafer top side, edge, …

2007年12月3日 · KLA-Tencor (NASDAQ:KLAC) today introduced the WaferSight 2, the semiconductor industry's first metrology system that enables wafer suppliers and chipmakers …

针对基于面板的晶圆级封装应用，Zeta™-6xx 系列轮廓仪可进行自动面板操作，具备与 5xx 系列相同的量测测量功能。 KLA 拥有支持先进包装的软件解决方案。 Klarity ® 和 5D Analyzer ® 集 …