Lam Research TCP 9400 Poly Etcher (lampoly)
Lampoly is a Transformer Coupled Plasma (TCP) etcher, generates a uniform, high density plasma for selective etching of silicon and polysilicon. It has two independent 13.56 MHz RF …
LAM 9400 - LNF Wiki - University of Michigan
2024年12月5日 · The LAM 9400 SE is a high density plasma etch tool manufactured by LAM Research Corporation. This tool was originally designed for production polysilicon etching, but …
LAM – TCP-9400SE . AG Semiconductor Services • [email protected] • www.agsemiconductor.com 2 ... TCP 9400 Stand alone Bulkhead Yes Standard,Hine 38A …
LAM 9600 VS LAM 9400 ：等离子蚀刻系统的全面比较 - 半导体设 …
2024年12月10日 · LAM 9600 和 LAM 9400 是 Lam Research 致力于等离子蚀刻技术创新的典范。 每台系统在半导体制造中都发挥着独特的作用： LAM 9600 具有出色的精度，对于大批量、先 …
LAM 9400/Processes - LNF Wiki - University of Michigan
2024年9月17日 · The LAM 9400 has a variety of processes available. There are standard supported recipes for poly, oxide and nitride, although there are many more materials etched …
The LAM 9400 is a high density plasma etch tool manufactured by LAM Research Corporation. It uses LAM’s TCP, which is a special patented form of ICP source, to create plasma density. It …
无锡邑文微电子科技股份有限公司 - amteglobal
2020年9月7日 · TCP系列设备是Lam基于ICP的单腔体型刻蚀设备，刻蚀线宽≥0.3微米；主要用于8英寸及以下晶圆的氧化硅、氮化硅、多晶硅、硅及金属材料的刻蚀。 TCP设备占地面积小、 …
The TCP® 9400 system uses Lam's patented TCP® technology and offers several key benefits for polysilicon etch. The TCP® technology creates an inductively coupled, high-density plasma …
LAM TCP 9400 干法刻蚀机-上海芯立电子科技有限公司
机型：lamtcp 9400 干法刻蚀机. 制造商：lam . 设备描述：poly 刻蚀. 晶圆尺寸：6"/8" 数量：2台. 当前状态：在售
LAM 9400/Processes/LNF Poly - LNF Wiki - University of Michigan
2023年8月22日 · LNF_Poly can be used for etching Si, Polysilicon and GaAs. This process is fairly sensitive to the amount of open area of the wafer; the open area is the primary way to …