2024年12月5日 · The LAM 9400 SE is a high density plasma etch tool manufactured by LAM Research Corporation. This tool was originally designed for production polysilicon etching, but has been reconfigured for silicon based materials, III‐Vs, some metals, and organic materials.

2024年12月10日 · LAM 9600 和 LAM 9400 是 Lam Research 致力于等离子蚀刻技术创新的典范。 每台系统在半导体制造中都发挥着独特的作用： LAM 9600 具有出色的精度，对于大批量、先进节点的 IC 生产来说，它是必不可少的。

Factory: Lam RESEARCH CO., LTD.(台灣科林研發) Machine Type: TCP 9400SE Machine Serial No.: 4114 Process: 0.35 μm Feature Polysilicon Etching Wafer Size: 150 mm Pre/Post Treatment: N/A Endpoint Signal Filter: 405 nm, 520 nm

Lampoly is a Transformer Coupled Plasma (TCP) etcher, generates a uniform, high density plasma for selective etching of silicon and polysilicon. It has two independent 13.56 MHz RF power supplies which deliver high and low power to the upper and lower electrodes, respectively.

The LAM 9400 is a high density plasma etch tool manufactured by LAM Research Corporation. It uses LAM’s TCP, which is a special patented form of ICP source, to create plasma density. It has a second bias source for controlling ion bombardment energy.

LAM RESEARCH TCP 9400 SE II是一款多功能、高性能的臺式等離子蝕刻器,專為各種半導體應用而設計,具有17英寸液晶觸摸屏、大蝕刻窗、雙負載鎖、適應性蝕刻化學和各種安全功能。

LAM RESEARCH TCP 9400 SE II is a versatile, high-performance benchtop plasma etcher designed for a wide range of semiconductor applications, featuring a 17-inch LCD touchscreen, large etch window, dual load locks, adaptable etch chemistry, and various safety features.

LAM RESEARCH TCP 9400 SE II是一款多功能、高性能的台式等离子蚀刻器,专为各种半导体应用而设计,具有17英寸液晶触摸屏、大蚀刻窗、双负载锁、适应性蚀刻化学和各种安全功能。

TCP系列设备是Lam基于ICP的单腔体型刻蚀设备，刻蚀线宽≥0.3微米；主要用于8英寸及以下晶圆的氧化硅、氮化硅、多晶硅、硅及金属材料的刻蚀。 TCP设备占地面积小、设备集成度高，适用于规模化生产。

机型：lamtcp 9400 干法刻蚀机. 制造商：lam . 设备描述：poly 刻蚀. 晶圆尺寸：6"/8" 数量：2台. 当前状态：在售