Lam’s Reliant® products provide etch, deposition and clean solutions for a wide range of applications such as those addressing the Specialty Technologies market and for nodes ≥14 nm for conventional CMOS.

Lam’s Reliant ® etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs. The “more than Moore” markets – including MEMS, power devices, and the Internet of Things (IoT) – are driving the need for low-cost manufacturing solutions with capability to address new etch process requirements.

Lam’s Reliant® deposition product family enables roadmaps for Specialty Technologies and extends the productive life of fabs.

2019年12月16日 · Lam Research has built 300 mm technological expertise and a comprehensive range of products that meet specific needs, including those for piezoelectric and wide band gap materials, and high-performance deep silicon etch applications.

2023年8月31日 · Lam’s Reliant® Systems group, which adapts and extends technologies so customers can manufacture innovative products, enables applications like haptics. Tactile sensations—such as pressure, texture, temperature, and …

2023年5月2日 · Lam’s Reliant Systems, part of CSBG, is a critical supplier of equipment enabling Specialty Technologies, to semiconductor manufacturers in node sizes greater than 90 nm, which are still very much in demand for the automotive industry.

FREMONT, Calif., March 26, 2024 / PRNewswire / -- Lam Research Corp. (Nasdaq: LRCX) today introduced the world's first production-oriented pulsed laser deposition (PLD) tool to enable next-generation MEMS-based microphones and radio frequency (RF) filters.