2023年9月14日 · Selective laser etching is a promising candidate for the mass production of glass interposers. It comprises two steps: local modification by an ultrashort-pulsed laser and …

2014年6月19日 · In this article we show how laser processing using deep UV excimer lasers at a wavelength of 193 nm provides a viable solution capable of drilling dense patterns of TGVs …

Abstract: laser-induced deep etching (LIDE) is a promising technology for efficient and cost-effective through glass via (TGV) manufacturing. In this paper, the effect of nine independently …

6 天之前 · 激光诱导深度蚀刻，英文名 Laser-Induced-Deep Etching，缩写LIDE。 LIDE工艺仅需两个步骤。 第一步，根据设计图形对加工玻璃进行选择性激光改性。在LIDE工艺中，单次激光 …

激光诱导选择性蚀刻 （Laser-Induced Selective Etching，LISE） LISE 是一种 TGV 形成技术，该技术使用激光局部蚀刻照射区域以形成图案。 使用脉冲宽度极短（从飞秒到皮秒）的激光， …

However, through the non-linear absorption incurred by ultrafast laser the micro size vias in glass material can be fabricated. In this study, we demonstrated combining non-diffraction Bessel …

defect-free TGV formation are critical challenges. There was a proposal to handle the ultra-thin glass panels laminating a polymer film on both sides of a glass panel

2019年6月1日 · A defect-free TGV formation technology in polymer-laminated glass substrates is required to realize a highly reliable 3D glass IPD.

In this paper, the Laser-Induced Deep Etching (LIDE) technology is used to manufacture TGVs on glass substrate. The LIDE process can be mainly divided into two steps: Initially, picosecond …

2025年3月17日 · EKSPLA 推出的Femtolux 30这款GHz飞秒激光器，通过GHz Burst 加工模式可以形成高深宽比，高质量的TGV。通过GHz Burst 将单个高脉冲能量的脉冲细分到50个小脉冲 …