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2024年4月19日 · As feature sizes continue to shrink for more advanced nodes, local critical dimension (CD) uniformity (LCDU) control becomes more critical than ever for improving defectivity, edge placement error, and yield enhancement.

In this study we explore the impacts of various shrink methods to optimize LCDU and defect density. In this study a simple patterning stack of SiN + OPL + ARC + resist is used to simulate contact patterning. Various etch chambers and shrink techniques are used to reach a target CD range and LCDU and defect density are evaluated.

2023年4月28日 · Improving local critical dimension uniformity (LCDU) is always significant for enlarging process windows and reducing defect rates in lithography, especially for more scaling sub-20nm nodes in DRAM devices.

Here we study the process performance of DSA pattern wet etch chemistry and subsequent dry etch pattern transfer into bilayer hardmask material using both metrology and electrical yield measurements as evaluation criteria.

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