These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

The replacement family of products is E28H 0.05-100 Torr Heated (100°C) Baratron® Capacitance Manometers with Etch Sensor. The E28F Baratron® manometer is temperature controlled to 100°C, accurate to 0.25% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. Avail. Loading...

E28H Heated (100°C) Baratron® Capacitance Manometer with Etch Sensor. Product Features. • Percent of Reading accuracy for more precise output signal in lower pressure ranges. • Full Scale ranges as low as 50 mTorr (0.07 mbar) for precise measurement of low pressure processes. • All-Inconel corrosion-resistant wetted surfaces.

MKS型E28D是符合rohs标准的蚀刻过程引起漂移的解决方案。 基于行业标准的Baratron电容压力计，MKS开发了传感器结构，几乎消除了隔膜上工艺副产品的沉积，从而最大限度地减少了漂移。

the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. SERVICE BY QUALIFIED PERSONNEL ONLY

Part #: E28F. Download. File Size: 740Kbytes. Page: 16 Pages. Description: 600 Series Analog Capacitance Manometers. Manufacturer: MKS Instruments..

The E28H11TDE2B e-Baratron® Ethernet-Enabled, 100°C Heated Absolute Capacitance Manometer, with an Etch Sensor features 10 Torr full scale pressure measurement ...

The MKS Type E28D is the RoHS-compliant solution for etch process-induced drift. Based on the industry-standard Baratron capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the …

MKS Instruments's E28D.1TBF1B is a temperature regulated capacitance manometer with etch sensor. in the sensors, industrial pressure sensors category. Check part details, parametric & specs updated 12-MAR-2025and download pdf datasheet from datasheets.com, a global distributor of electronics components.

The E28H.1TBF5B e-Baratron® Ethernet-Enabled, 100°C Heated Absolute Capacitance Manometer, with an Etch Sensor features 0.1 Torr full scale pressure measurement with 0.5% accuracy, horizontal calibration, and a Swagelok® 8 female VCR® fitting.