2023年9月27日 · Herein, we report a new method in which single-phase (liquid) precursors are used for the metal–organic chemical vapor deposition (MOCVD) growth of a MoS 2 film.

2021年9月2日 · Here we demonstrate the epitaxial growth of 2 inch (~50 mm) monolayer molybdenum disulfide (MoS 2) single crystals on a C-plane sapphire. We designed the miscut orientation towards the A axis...

2023年11月1日 · Here, we develop a carbon-free reproducible route for the scalable growth of high-quality monolayer MoS 2 by selecting molybdenum dichloride dioxide (MoO 2 Cl 2) as the Mo source and integrating the precursor with a standard low-pressure cold-wall metalorganic chemical vapor deposition (MOCVD) system.

To achieve large area growth of transition metal dichalcogenides of uniform monolayer thickness, we demonstrate metal–organic chemical vapor deposition (MOCVD) growth under low pressure followed by a high-temperature sulfurization process under atmospheric pressure (AP).

2023年5月17日 · In this study, layered MoS 2 nanocrystals less than 50 nm in diameter were synthesized by overlapping with each other as vertical growth in the form of a film with an area of 10 mm × 40 μm using metal–organic chemical vapor deposition (MOCVD) for …

2019年8月28日 · Here, we report the wafer-scale growth of high-quality monolayer MoS2 on singlecrystalline sapphire and also on SiO2 substrates by a facile metal-organic chemical vapor deposition (MOCVD) method.

2021年5月24日 · By combining in situ gas-phase monitoring with ex situ microscopy and spectroscopy analyses, we systematically investigate the effect of temperature and Mo (CO) 6 /DES/H 2 gas mixture ratios on film morphology, chemical composition, and stoichiometry.

we report a new pulsed metal−organic chemical vapor deposition (MOCVD) route for MoS 2 film growth in a research-grade single-wafer reactor. Using bis(tert-butylimido)-bis(dimethylamido)molybdenum and diethyl disulfide, we deposit MoS 2 films from ∼1 nm to ∼25 nm in thickness on SiO 2 /Si substrates. We show that layered 2H-MoS 2 can

2022年7月14日 · Here, we report on the systematic development of a two-stage MOCVD process to prepare MoS 2 monolayers on 2″ sapphire substrates using the AIXTRON CCS (close-coupled showerhead) MOCVD platform equipped with state-of-the-art in situ monitoring.

2023年1月16日 · In this work, high-quality NbS 2 –MoS 2 lateral heterostructures are synthesized by one-step metal–organic chemical vapor deposition (MOCVD) together with monolayer MoS 2 substitutionally doped by Nb, resulting in a p-type doped behavior.