Market leading Nanoimprint Lithography systems for cost …
EVG is the market-leading supplier of nanoimprint lithography (NIL) equipment and integration processes. EVG pioneered and mastered NIL from a research approach more than 15 years …
HERCULES ® NIL - EV Group
The HERCULES NIL 200mm is the industry for nanoimprint lithography in high volume manufacturing. Based on a modular platform, the HERCULES NIL combines EVG’s …
EVG®7300 Automated SmartNIL® UV-NIL System - EV Group
The versatile EVG ® 7300 UV Nanoimprint Lithography System can support multiple related UV processes: SmartNIL, Wafer Level Optics (WLO) and Stacking – three capabilities merged in …
EVG 610（NIL）纳米压印系统 - 武汉瑞德仪科技有限公司
EVG 610 （ NIL ）是一款基于 EVG610 光刻机的紫外纳米压印设备，可针对压印、光刻、对准功能进行快速转换。 主要特点及参数： · 最大支持 6 英寸（ 150mm ）晶圆. · 最高分辨率可达 …
EV GROUP® Solutions for Nanoimprint Lithography
Pioneering this non-conventional lithography technique for many years, EVG mastered NIL and has implemented it in volume production on ever-increasing substrate sizes. EVG’s proprietary …
EVG 纳米压印光刻_参数_价格-仪器信息网
evg 是纳米压印光刻（ nil ）设备和集成工艺的市场领先供应商。 EVG 从 15 年前的研究方法中率先并掌握了 NIL ，并实现了从 2 英寸化合物半导体晶圆到 300 mm 晶圆甚至大面积面板的各 …
EVG 620NT（NIL）纳米压印系统_亚科电子 - astchina.com
产品简介： EVG 620NT（NIL）是一款基于EVG620NT光刻机的紫外纳米压印设备，基于Smart NIL 掩膜对准技术. 主要特点及参数： ·最大支持6英寸（150mm）晶圆. ·最高分辨率可 …
Combines preprocessing and UV-NIL on a modular platform Redeems the long-term promise of nanoimprinting being a cost effective and high-volume alternative lithography technology
EVG紫外纳米压印HERCULES NIL_参数_价格-仪器信息网
evg的hercules nil 300 mm是一个完全集成的纳米压印系统，是evg的nil产品组合的最新成员。 hercules nil基于模块化平台，在单个平台上将清洗模块，抗蚀剂涂层模块和烘烤预处理模块 …
EVG ® 7200 - EV Group
The EVG7200 system leverages EVG's innovative SmartNIL technology enabling manufacturing of micro- and nanostructures with high pattern fidelity and low residual layer. Exposure with …
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