Role of Oxygen in PECVD Carbon Nanotubes Growth: Experiments …
2023年2月21日 · We investigate by modeling supported by experiments the role of oxygen in carbon nanotubes (CNT) growth by plasma enhanced chemical vapor deposition (PECVD) …
Enhancement of catalytic effect for CNT growth at low temperature by PECVD
2018年9月30日 · Previous studies have shown a large difference in CNT growth by using PECVD depending on the choice of Fe or Ni catalyst. It was easier to obtain high (several …
PECVD法生长碳纳米管及其应用研究进展,Current Nanoscience - X …
主要的三种技术如下：（1）电弧放电技术，（2）激光烧蚀技术，（3）化学气相沉积（cvd）技术。等离子体增强化学气相沉积（pecvd）是生长cnt的最佳替代方法，是化学气相沉积（cvd） …
PECVD low temperature synthesis of carbon nanotubes coated …
2012年10月25日 · For these applications the Plasma Enhanced Chemical Vapor Deposition (PECVD) seems to be the most promising thanks to the vertical growth of CNT, the easy …
Carbon nanotube growth by PECVD: a review - IOPscience
2003年4月2日 · Recently, plasma enhanced chemical vapour deposition (PECVD) has emerged as a key growth technique to produce vertically-aligned nanotubes. This paper reviews various …
通过 PECVD 生长碳纳米管：综述,Plasma Sources Science and …
最近，等离子体增强化学气相沉积 (PECVD) 已成为生产垂直排列的纳米管的关键生长技术。 本文综述了目前用于 CNT 生长、催化剂制备和生长结果的各种等离子体源。 由于该技术处于早期 …
The Influence of the PECVD Parameters on the Growth of
2022年4月28日 · In this work, we study the influence of the CNT growth temperature and the thickness of the catalytic layer on the geometric and structural parameters of carbon …
Plasma-Enhanced Chemical Vapor Deposition (PECVD) is utilized since it allows the growth of oriented multi-wall CNT. A cleaned substrate (primarily silicon) is coated with a metal that has …
PECVD增强低温碳纳米管生长的催化效果,Applied Surface Science
2018年9月1日 · 研究了通过在暴露于 H2:C2H4 等离子体之前使用 H2 等离子体预先减小 Ni 颗粒的尺寸来改善 Ni/TiN/SiO2/Si 上的 CNT 地毯生长。 结合不同的技术，SEM、原位拉曼 …
Modeling low and high temperature controls in the growth of …
2021年8月31日 · Plasma enhanced chemical vapor deposition (PECVD) technique is successfully employed for the controlled synthesis of CNT and graphene [12–26] as it offers low …
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