Microstructural and tribological characterization of DLC coatings ...
2020年5月15日 · DLCs by HiPIMS and PIID show a higher gross spallation resistance. H/E ratio is higher for the DLC by PECVD. The most wear-resistant DLC is the one by PECVD. In this …
用RF-PECVD法制备类金刚石薄膜
用射频等离子体增强化学气相沉积 (RF-PECVD)法在硅衬底上沉积类金刚石 (DLC)薄膜，通过控制甲烷 (CH4)与氩气 (Ar)流量的比值 (V C H 4 / V A r)分别在上极板和下极板上沉积制备出一系 …
Study on properties of diamond-like carbon films deposited by RF …
2023年10月1日 · Presents a study of Diamond-like Carbon films with different sp 3 content (35–70 %). The investigated DLC films were deposited by the RF ICP PECVD technique. Structural, …
Deposition of DLC (PECVD) - scia Systems GmbH
PECVD enables the deposition of DLC layers with less than 1.5 % uniformity variation; DLC properties are precisely adjustable by changing process conditions
本文介绍采用PECVD 技术在平面工件表面、活塞环表面和管道内表面快速沉积压应力(贫 Si 层)和张应力(富 Si 层)交替的超厚DLC 膜层。 研究结果表明,在 M2 高速钢和活塞环功能面上均能沉 …
Influence of DLC Coatings Deposited by PECVD Technology on …
2020年9月25日 · The functional role of forming an adhesive sublayer based on (CrAlSi)N immediately before the application of the external DLC film by plasma-enhanced chemical …
DLC类金刚石薄膜涂层及其研究进展 - Prochina
采用射频等离子体化学气相沉积(rf-pecvd)可以克服表面电荷累积效应，提高沉积速率，是目前应用最广泛的实验室dlc薄膜制备方法。rf-pecvd分为电感式和电容式两种，其中电容式应用较多。
PECVD制备DLC薄膜的表面形貌和光学特性研究 - 百度学术
采用pecvd技术可以在室温下在si和玻璃上衬底上制备出具有一定减反射效果和透射作用的dlc薄膜,这对新型光电子器件特别是太阳能光伏器件的应用具有重要意义.
Bias voltage-induced structural change in PECVD ... - ScienceDirect
2024年5月30日 · PECVD was employed to deposit multilayer DLC coatings with a-Si:C:H bonding layer and H-DLC transition layer. Bias voltages were adjusted to investigate the influences on …
等离子体增强化学气相沉积 (Pecvd)：综合指南 - Kintek Solution
等离子体增强化学气相沉积（PECVD） 是一种广泛应用于半导体行业的薄膜沉积技术。 它将化学气相沉积 (CVD) 原理与等离子体技术相结合，可生成高质量薄膜并精确控制其特性。 与传统 …